- microlithography photomask
- фотошаблон
English-Russian dictionary of microelectronics. 2014.
English-Russian dictionary of microelectronics. 2014.
Photomask — A photomask. A schematic illustration of a photomask (top) … Wikipedia
Электронная литография — или электронно лучевая литография метод нанолитографии с использованием электронного пучка. Остросфокусированный электронный пучок, отклоняемый магнитной системой, прорисовывает нужные конфигурации на поверхности чувствительного к… … Википедия
Lithography — Charles Marion Russell s The Custer Fight (1903). Note the range of tones, fading toward the edges … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… … Wikipedia